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    Influence of surfactant and salts on chemical mechanical planarisation of copper

    New search for: Bernard, P.
    New search for: Kapsa, P.
    New search for: Coude, T.
    New search for: Abry, J. C.

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    Influence of surfactant and salts on chemical mechanical planarisation of copper

    New search for: Bernard, P.
    New search for: Kapsa, P.
    New search for: Coude, T.
    New search for: Abry, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of surfactant and salts on chemical mechanical planarisation of copper

    New search for: Bernard, P.
    New search for: Kapsa, P.
    New search for: Coude, T.
    New search for: Abry, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Influence of surfactant and salts on chemical mechanical planarisation of copper

    Contributors:

    Bernard, P. (author) / Kapsa, P. (author) / Coude, T. (author) / Abry, J. C. (author)

    Published in:

    WEAR -LAUSANNE- ; 259 ; 1367-1371

    Publication date:

    2005-01-01

    Size:

    5 pages

    ISSN:

    0043-1648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11292

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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