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    Effects of kinematic forms on material removal rate and non-uniformity in chemical mechanical planarisation

    New search for: Wang, C.L.
    New search for: Jin, Z.J.
    New search for: Kang, R.K.
    New search for: Wang, J.
    New search for: Gao, H.
    New search for: Guo, D.
    New search for: Kang, R.

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    Effects of kinematic forms on material removal rate and non-uniformity in chemical mechanical planarisation

    New search for: Wang, C.L.
    New search for: Jin, Z.J.
    New search for: Kang, R.K.
    New search for: Wang, J.
    New search for: Gao, H.
    New search for: Guo, D.
    New search for: Kang, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of kinematic forms on material removal rate and non-uniformity in chemical mechanical planarisation

    New search for: Wang, C.L.
    New search for: Jin, Z.J.
    New search for: Kang, R.K.
    New search for: Wang, J.
    New search for: Gao, H.
    New search for: Guo, D.
    New search for: Kang, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Effects of kinematic forms on material removal rate and non-uniformity in chemical mechanical planarisation

    Contributors:

    Wang, C.L. (author) / Jin, Z.J. (author) / Kang, R.K. (author) / Wang, J. / Gao, H. / Guo, D. / Kang, R.

    Published in:

    CURRENT DEVELOPMENT IN SURFACE ENGINEERING AND TECHNOLOGIES ; 54-62

    INTERNATIONAL JOURNAL OF MATERIALS AND PRODUCT TECHNOLOGY ; 31

    Publication date:

    2008-01-01

    Size:

    9 pages

    ISSN:

    0268-1900

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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