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Micro Angle Measurement for a Scanning Stage

Liu, Q. G. / Li, M. / Li, D. C. / Li, Z. G. / Hu, X. T.

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Micro Angle Measurement for a Scanning Stage

Liu, Q. G. / Li, M. / Li, D. C. / Li, Z. G. / Hu, X. T.

Micro Angle Measurement for a Scanning Stage

Liu, Q. G. / Li, M. / Li, D. C. / Li, Z. G. / Hu, X. T.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Micro Angle Measurement for a Scanning Stage

Contributors:

Liu, Q. G. (author) / Li, M. (author) / Li, D. C. (author) / Li, Z. G. (author) / Hu, X. T. (author) / Gao, Y. / Tse, S. / Gao, W.

Published in:

Measurement Technology and Intelligent Instruments VI ; 119-124

KEY ENGINEERING MATERIALS ; 295/296

Publication date:

2005-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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