Ion-, photoelectron- and laser-assisted analytical investigation of nano-structured mixed HfO2-SiO2 and ZrO2-SiO2 thin films: Fid-Bau Portal

Ion-, photoelectron- and laser-assisted analytical investigation of nano-structured mixed HfO2-SiO2 and ZrO2-SiO2 thin films

Armelao, L. / Bleiner, D. / Di Noto, V. / Gross, S. / Sada, C. / Schubert, U. / Tondello, E. / Vonmont, H. / Zattin, A.

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Ion-, photoelectron- and laser-assisted analytical investigation of nano-structured mixed HfO2-SiO2 and ZrO2-SiO2 thin films

Armelao, L. / Bleiner, D. / Di Noto, V. / Gross, S. / Sada, C. / Schubert, U. / Tondello, E. / Vonmont, H. / Zattin, A.

Ion-, photoelectron- and laser-assisted analytical investigation of nano-structured mixed HfO2-SiO2 and ZrO2-SiO2 thin films

Armelao, L. / Bleiner, D. / Di Noto, V. / Gross, S. / Sada, C. / Schubert, U. / Tondello, E. / Vonmont, H. / Zattin, A.

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Document information

Title:

Ion-, photoelectron- and laser-assisted analytical investigation of nano-structured mixed HfO2-SiO2 and ZrO2-SiO2 thin films

Contributors:

Armelao, L. (author) / Bleiner, D. (author) / Di Noto, V. (author) / Gross, S. (author) / Sada, C. (author) / Schubert, U. (author) / Tondello, E. (author) / Vonmont, H. (author) / Zattin, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 249 ; 277-294

Publication date:

2005-01-01

Size:

18 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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