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SIMS investigation of gettering centres produced by phosphorus MeV ion implantation

Krecar, D. / Fuchs, M. / Kogler, R. / Hutter, H.

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SIMS investigation of gettering centres produced by phosphorus MeV ion implantation

Krecar, D. / Fuchs, M. / Kogler, R. / Hutter, H.

SIMS investigation of gettering centres produced by phosphorus MeV ion implantation

Krecar, D. / Fuchs, M. / Kogler, R. / Hutter, H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

SIMS investigation of gettering centres produced by phosphorus MeV ion implantation

Contributors:

Krecar, D. (author) / Fuchs, M. (author) / Kogler, R. (author) / Hutter, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 278-281

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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