Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I. / Yli-Koski, M. / Savin, H. et al. | British Library Online Contents | 2009

SIMS investigation of gettering centres produced by phosphorus MeV ion implantation

Krecar, D. / Fuchs, M. / Kogler, R. et al. | British Library Online Contents | 2005

Proximity gettering of platinum in silicon following implantation with alpha particles at low doses

Schmidt, D.C. / Barbot, J.F. / Blanchard, C. et al. | British Library Online Contents | 2000

Gettering of platinum by cavities induced in silicon by high energy implantation of HE ions

Mariani-Regula, G. / Pichaud, B. / Godey, S. et al. | British Library Online Contents | 2000

The hydrogen gettering at post-implantation hydrogen plasma treatments of helium- and hydrogen implanted Czochralski silicon

Ulyashin, A. G. / Ivanov, A. I. / Job, R. et al. | British Library Online Contents | 2000