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    High Speed Deposition of Y~2O~3 Films by Laser-Assisted Chemical Vapor Deposition

    New search for: Banal, R.
    New search for: Kimura, T.
    New search for: Goto, T.

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    High Speed Deposition of Y~2O~3 Films by Laser-Assisted Chemical Vapor Deposition

    New search for: Banal, R.
    New search for: Kimura, T.
    New search for: Goto, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High Speed Deposition of Y~2O~3 Films by Laser-Assisted Chemical Vapor Deposition

    New search for: Banal, R.
    New search for: Kimura, T.
    New search for: Goto, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    High Speed Deposition of Y~2O~3 Films by Laser-Assisted Chemical Vapor Deposition

    Contributors:

    Banal, R. (author) / Kimura, T. (author) / Goto, T. (author)

    Published in:

    MATERIALS TRANSACTIONS ; 46 ; 2114-2116

    Publication date:

    2005-01-01

    Size:

    3 pages

    ISSN:

    1345-9678

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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