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    High-speed deposition of dense, dendritic and porous SiO2 films by Nd: YAG laser chemical vapor deposition

    New search for: Endo, J.
    New search for: Ito, A.
    New search for: Kimura, T.
    New search for: Goto, T.

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    High-speed deposition of dense, dendritic and porous SiO2 films by Nd: YAG laser chemical vapor deposition

    New search for: Endo, J.
    New search for: Ito, A.
    New search for: Kimura, T.
    New search for: Goto, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High-speed deposition of dense, dendritic and porous SiO2 films by Nd: YAG laser chemical vapor deposition

    New search for: Endo, J.
    New search for: Ito, A.
    New search for: Kimura, T.
    New search for: Goto, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    High-speed deposition of dense, dendritic and porous SiO2 films by Nd: YAG laser chemical vapor deposition

    Contributors:

    Endo, J. (author) / Ito, A. (author) / Kimura, T. (author) / Goto, T. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 166 ; 225-229

    Publication date:

    2010-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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