Boron diffusion in strained and strain-relaxed SiGe: Fid-Bau Portal

Boron diffusion in strained and strain-relaxed SiGe

Wang, C. C. / Sheu, Y. M. / Liu, S. / Duffy, R. / Heringa, A. / Cowern, N. E. / Griffin, P. B.

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Boron diffusion in strained and strain-relaxed SiGe

Wang, C. C. / Sheu, Y. M. / Liu, S. / Duffy, R. / Heringa, A. / Cowern, N. E. / Griffin, P. B.

Boron diffusion in strained and strain-relaxed SiGe

Wang, C. C. / Sheu, Y. M. / Liu, S. / Duffy, R. / Heringa, A. / Cowern, N. E. / Griffin, P. B.

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Check availability in my library

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Document information

Title:

Boron diffusion in strained and strain-relaxed SiGe

Contributors:

Wang, C. C. (author) / Sheu, Y. M. (author) / Liu, S. (author) / Duffy, R. (author) / Heringa, A. (author) / Cowern, N. E. (author) / Griffin, P. B. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 39-44

Publication date:

2005-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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