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Wafer bonding involving strain-relaxed SiGe

Radu, I. / Singh, R. / Reiche, M. / Gosele, U. / Christiansen, S. H.

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Wafer bonding involving strain-relaxed SiGe

Radu, I. / Singh, R. / Reiche, M. / Gosele, U. / Christiansen, S. H.

Wafer bonding involving strain-relaxed SiGe

Radu, I. / Singh, R. / Reiche, M. / Gosele, U. / Christiansen, S. H.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Wafer bonding involving strain-relaxed SiGe

Contributors:

Radu, I. (author) / Singh, R. (author) / Reiche, M. (author) / Gosele, U. (author) / Christiansen, S. H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 158-161

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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