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Phosphorus diffusion in the presence of threading dislocations in strain relaxed SiGe films

Christensen, J. S. / Kuznetsov, A. Y. / Gunnaes, A. E. / Svensson, B. G. / Radamson, H. H.

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Phosphorus diffusion in the presence of threading dislocations in strain relaxed SiGe films

Christensen, J. S. / Kuznetsov, A. Y. / Gunnaes, A. E. / Svensson, B. G. / Radamson, H. H.

Phosphorus diffusion in the presence of threading dislocations in strain relaxed SiGe films

Christensen, J. S. / Kuznetsov, A. Y. / Gunnaes, A. E. / Svensson, B. G. / Radamson, H. H.

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Document information

Title:

Phosphorus diffusion in the presence of threading dislocations in strain relaxed SiGe films

Contributors:

Christensen, J. S. (author) / Kuznetsov, A. Y. (author) / Gunnaes, A. E. (author) / Svensson, B. G. (author) / Radamson, H. H. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 650-654

Publication date:

2006-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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