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Compressively strained Ge channels on relaxed SiGe buffer layers

Bollani, M. / Muller, E. / Signoretti, S. / Beeli, C. / Isella, G. / Kummer, M. / von Kanel, H.

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Compressively strained Ge channels on relaxed SiGe buffer layers

Bollani, M. / Muller, E. / Signoretti, S. / Beeli, C. / Isella, G. / Kummer, M. / von Kanel, H.

Compressively strained Ge channels on relaxed SiGe buffer layers

Bollani, M. / Muller, E. / Signoretti, S. / Beeli, C. / Isella, G. / Kummer, M. / von Kanel, H.

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Document information

Title:

Compressively strained Ge channels on relaxed SiGe buffer layers

Contributors:

Bollani, M. (author) / Muller, E. (author) / Signoretti, S. (author) / Beeli, C. (author) / Isella, G. (author) / Kummer, M. (author) / von Kanel, H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 101 ; 102-105

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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