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A platform for research: civil engineering, architecture and urbanism
Comprehensive modeling of ion-implant amorphization in silicon
Comprehensive modeling of ion-implant amorphization in silicon
Comprehensive modeling of ion-implant amorphization in silicon
Mok, K. R. (author) / Jaraiz, M. (author) / Martin-Bragado, I. (author) / Rubio, J. E. (author) / Castrillo, P. (author) / Pinacho, R. (author) / Srinivasan, M. P. (author) / Benistant, F. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 383-385
2005-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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