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Mechanical property development in reactively sputtered tantalum carbide/amorphous hydrocarbon thin films

Evans, R. D. / Doll, G. L. / Glass, J. T.

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Mechanical property development in reactively sputtered tantalum carbide/amorphous hydrocarbon thin films

Evans, R. D. / Doll, G. L. / Glass, J. T.

Mechanical property development in reactively sputtered tantalum carbide/amorphous hydrocarbon thin films

Evans, R. D. / Doll, G. L. / Glass, J. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Mechanical property development in reactively sputtered tantalum carbide/amorphous hydrocarbon thin films

Contributors:

Evans, R. D. (author) / Doll, G. L. (author) / Glass, J. T. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 21 ; 1500-1511

Publication date:

2006-01-01

Size:

12 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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