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    Effects of argon gas flow rate and guide shell on oxygen concentration in Czochralski silicon growth

    New search for: Ren, B.
    New search for: Zhao, L.
    New search for: Zhao, X.
    New search for: Wang, H.
    New search for: Cao, Z.
    New search for: Zhu, H.
    New search for: Fu, H.

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    Effects of argon gas flow rate and guide shell on oxygen concentration in Czochralski silicon growth

    New search for: Ren, B.
    New search for: Zhao, L.
    New search for: Zhao, X.
    New search for: Wang, H.
    New search for: Cao, Z.
    New search for: Zhu, H.
    New search for: Fu, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of argon gas flow rate and guide shell on oxygen concentration in Czochralski silicon growth

    New search for: Ren, B.
    New search for: Zhao, L.
    New search for: Zhao, X.
    New search for: Wang, H.
    New search for: Cao, Z.
    New search for: Zhu, H.
    New search for: Fu, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effects of argon gas flow rate and guide shell on oxygen concentration in Czochralski silicon growth

    Contributors:

    Ren, B. (author) / Zhao, L. (author) / Zhao, X. (author) / Wang, H. (author) / Cao, Z. (author) / Zhu, H. (author) / Fu, H. (author)

    Published in:

    RARE METALS -BEIJING- ENGLISH EDITION ; 25 ; 7-10

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    1001-0521

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  669

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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