Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Fabrication of Nanoscale Gratings by Nanoimprint on Silicon Wafer

    New search for: Fan, X. Q.
    New search for: Zhang, H. H.
    New search for: Liu, S.
    New search for: Jia, K.
    New search for: Gan, Z. Y.
    New search for: Yuan, Z.
    New search for: Xu, X.
    New search for: Zuo, D.
    New search for: Yuan, J.
    New search for: Yao, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Fabrication of Nanoscale Gratings by Nanoimprint on Silicon Wafer

    New search for: Fan, X. Q.
    New search for: Zhang, H. H.
    New search for: Liu, S.
    New search for: Jia, K.
    New search for: Gan, Z. Y.
    New search for: Yuan, Z.
    New search for: Xu, X.
    New search for: Zuo, D.
    New search for: Yuan, J.
    New search for: Yao, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fabrication of Nanoscale Gratings by Nanoimprint on Silicon Wafer

    New search for: Fan, X. Q.
    New search for: Zhang, H. H.
    New search for: Liu, S.
    New search for: Jia, K.
    New search for: Gan, Z. Y.
    New search for: Yuan, Z.
    New search for: Xu, X.
    New search for: Zuo, D.
    New search for: Yuan, J.
    New search for: Yao, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Fabrication of Nanoscale Gratings by Nanoimprint on Silicon Wafer

    Contributors:

    Fan, X. Q. (author) / Zhang, H. H. (author) / Liu, S. (author) / Jia, K. (author) / Gan, Z. Y. (author) / Yuan, Z. / Xu, X. / Zuo, D. / Yuan, J. / Yao, Y.

    Published in:

    Advances in Machining & Manufacturing Technology VIII ; 825-828

    KEY ENGINEERING MATERIALS ; 315/316

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Fabrication of the similar porous alumina silicon template for soft UV nanoimprint lithography

    Sun, T. / Xu, Z. / Zhao, W. et al. | British Library Online Contents | 2013

    Wafer-level fabrication and optical characterization of nanoscale patterned sapphire substrates

    Lin, Y. S. / Hsu, W. C. / Huang, K. C. et al. | British Library Online Contents | 2011

    Nanogauges gratings for strain determination at nanoscale

    Marae Djouda, Joseph / Montay, Guillaume / Panicaud, Benoit et al. | British Library Online Contents | 2017

    Nanoscale friction and wear properties of silicon wafer under different lubrication conditions

    Chen, X. / Zhao, Y. / Wang, Y. et al. | British Library Online Contents | 2013

    Local Doping of Silicon Using Nanoimprint Lithography and Molecular Monolayers

    Voorthuijzen, W. P. / Yilmaz, M. D. / Naber, W. J. et al. | British Library Online Contents | 2011

    Back to top