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Local Doping of Silicon Using Nanoimprint Lithography and Molecular Monolayers
Local Doping of Silicon Using Nanoimprint Lithography and Molecular Monolayers
Local Doping of Silicon Using Nanoimprint Lithography and Molecular Monolayers
Voorthuijzen, W. P. (author) / Yilmaz, M. D. (author) / Naber, W. J. (author) / Huskens, J. (author) / van der Wiel, W. G. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 23 ; 1346-1350
2011-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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