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SIMS quantitative depth profiling of matrix elements in semiconductor layers

Guryanov, G. / St. Clair, T. P. / Bhat, R. / Caneau, C. / Nikishin, S. / Borisov, B. / Budrevich, A.

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SIMS quantitative depth profiling of matrix elements in semiconductor layers

Guryanov, G. / St. Clair, T. P. / Bhat, R. / Caneau, C. / Nikishin, S. / Borisov, B. / Budrevich, A.

SIMS quantitative depth profiling of matrix elements in semiconductor layers

Guryanov, G. / St. Clair, T. P. / Bhat, R. / Caneau, C. / Nikishin, S. / Borisov, B. / Budrevich, A.

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Document information

Title:

SIMS quantitative depth profiling of matrix elements in semiconductor layers

Contributors:

Guryanov, G. (author) / St. Clair, T. P. (author) / Bhat, R. (author) / Caneau, C. (author) / Nikishin, S. (author) / Borisov, B. (author) / Budrevich, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 7208-7210

Publication date:

2006-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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