RF-plasma source qualification and compositional characterisation of GaNAs superlattices using SIMS: Fid-Bau Portal

RF-plasma source qualification and compositional characterisation of GaNAs superlattices using SIMS

Mulcahy, C. P. / Barker, S. J. / Williams, R. S. / Hopkinson, M. / Ashwin, M. J. / Stavrinou, P. N. / Parry, G. / Biswas, S. / Jones, T. S.

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RF-plasma source qualification and compositional characterisation of GaNAs superlattices using SIMS

Mulcahy, C. P. / Barker, S. J. / Williams, R. S. / Hopkinson, M. / Ashwin, M. J. / Stavrinou, P. N. / Parry, G. / Biswas, S. / Jones, T. S.

RF-plasma source qualification and compositional characterisation of GaNAs superlattices using SIMS

Mulcahy, C. P. / Barker, S. J. / Williams, R. S. / Hopkinson, M. / Ashwin, M. J. / Stavrinou, P. N. / Parry, G. / Biswas, S. / Jones, T. S.

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Check availability in my library

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Document information

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Document information

Title:

RF-plasma source qualification and compositional characterisation of GaNAs superlattices using SIMS

Contributors:

Mulcahy, C. P. (author) / Barker, S. J. (author) / Williams, R. S. (author) / Hopkinson, M. (author) / Ashwin, M. J. (author) / Stavrinou, P. N. (author) / Parry, G. (author) / Biswas, S. (author) / Jones, T. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 7218-7220

Publication date:

2006-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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