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Film thickness determining method of the silicon isotope superlattices by SIMS

Takano, A. / Shimizu, Y. / Itoh, K. M.

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Film thickness determining method of the silicon isotope superlattices by SIMS

Takano, A. / Shimizu, Y. / Itoh, K. M.

Film thickness determining method of the silicon isotope superlattices by SIMS

Takano, A. / Shimizu, Y. / Itoh, K. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Film thickness determining method of the silicon isotope superlattices by SIMS

Contributors:

Takano, A. (author) / Shimizu, Y. (author) / Itoh, K. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 1430-1432

Publication date:

2008-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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