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Silicon isotope superlattices: Ideal SIMS standards for shallow junction characterization
Silicon isotope superlattices: Ideal SIMS standards for shallow junction characterization
Silicon isotope superlattices: Ideal SIMS standards for shallow junction characterization
Shimizu, Y. (author) / Takano, A. (author) / Itoh, K. M. (author)
APPLIED SURFACE SCIENCE ; 255 ; 1345-1347
2008-01-01
3 pages
Article (Journal)
English
DDC:
621.35
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