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    Quantitative hydrogen measurements in PECVD and HWCVD a-Si:H using FTIR spectroscopy

    New search for: Goldie, D. M.
    New search for: Persheyev, S. K.

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    Quantitative hydrogen measurements in PECVD and HWCVD a-Si:H using FTIR spectroscopy

    New search for: Goldie, D. M.
    New search for: Persheyev, S. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Quantitative hydrogen measurements in PECVD and HWCVD a-Si:H using FTIR spectroscopy

    New search for: Goldie, D. M.
    New search for: Persheyev, S. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Quantitative hydrogen measurements in PECVD and HWCVD a-Si:H using FTIR spectroscopy

    Contributors:

    Goldie, D. M. (author) / Persheyev, S. K. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 41 ; 5287-5291

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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