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Characterization of post-copper CMP surfaces with scanning probe microscopy

Dominget, A. / Farkas, J. / Szunerits, S.

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Characterization of post-copper CMP surfaces with scanning probe microscopy

Dominget, A. / Farkas, J. / Szunerits, S.

Characterization of post-copper CMP surfaces with scanning probe microscopy

Dominget, A. / Farkas, J. / Szunerits, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Characterization of post-copper CMP surfaces with scanning probe microscopy

Contributors:

Dominget, A. (author) / Farkas, J. (author) / Szunerits, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 7760-7765

Publication date:

2006-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Linkov, V. / Sanderson, R. D. / Jacobs, E. P. | British Library Online Contents | 1994

Scanning probe microscopy

British Library Online Contents | 2006

Advances in Scanning Probe Microscopy

Sakurai, Toshio | TIBKAT | 2000

Theory of Scanning Probe Microscopy

Sasaki, Naruo / Tsukada, Masaru | Springer Verlag | 2000

Introduction to Scanning Probe Microscopy

Professor Dr. Meyer, Ernst / Professor Dr. Hug, Hans Josef / Dr. Bennewitz, Roland | Springer Verlag | 2004