Dry etching of MgCaO gate dielectric and passivation layers on GaN: Fid-Bau Portal

Dry etching of MgCaO gate dielectric and passivation layers on GaN

Hlad, M. / Voss, L. / Gila, B. P. / Abernathy, C. R. / Pearton, S. J. / Ren, F.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Dry etching of MgCaO gate dielectric and passivation layers on GaN

Hlad, M. / Voss, L. / Gila, B. P. / Abernathy, C. R. / Pearton, S. J. / Ren, F.

Dry etching of MgCaO gate dielectric and passivation layers on GaN

Hlad, M. / Voss, L. / Gila, B. P. / Abernathy, C. R. / Pearton, S. J. / Ren, F.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Dry etching of MgCaO gate dielectric and passivation layers on GaN

Contributors:

Hlad, M. (author) / Voss, L. (author) / Gila, B. P. (author) / Abernathy, C. R. (author) / Pearton, S. J. (author) / Ren, F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 8010-8014

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Fang, C. / Shapter, J. G. / Voelcker, N. H. et al. | British Library Online Contents | 2014

Interface Passivation for Silicon Dioxide Layers on Silicon Carbide

Dhar, S. / Wang, S. / Williams, J. R. et al. | British Library Online Contents | 2005

Properties of high-k Ti1-xSixO2 gate dielectric layers prepared at room temperature

Kim, S. / Ham, M. H. / Lee, J. W. et al. | British Library Online Contents | 2008

Enhanced DSSCs performance of TiO2 nanostructure by surface passivation layers

Tehare, Kailas K. / Navale, Sachin T. / Stadler, Florian J. et al. | British Library Online Contents | 2018

Passivation and control of semiconductor interfaces by interface control layers

Hasegawa, H. | British Library Online Contents | 1995