Dry etching of MgCaO gate dielectric and passivation layers on GaN

Hlad, M. / Voss, L. / Gila, B. P. et al. | British Library Online Contents | 2006

Interface Passivation for Silicon Dioxide Layers on Silicon Carbide

Dhar, S. / Wang, S. / Williams, J. R. et al. | British Library Online Contents | 2005

The use of titanium and titanium dioxide as masks for deep silicon etching

Powell, O. / Sweatman, D. / Harrison, H. B. | British Library Online Contents | 2006

Localization of anodic etching by thick polymer masks, and the composition of surface layers in electrochemical marking of aluminum alloy parts

Volodina, G. F. / Zvonkii, V. G. / Zuev, A. A. et al. | British Library Online Contents | 2005

Polymer masks for structured surface and plasma etching

Vital, A. / Vayer, M. / Sinturel, C. et al. | British Library Online Contents | 2015