Fabrication of 50 nm high performance strained-SiGe pMOSFETs with selective epitaxial growth: Fid-Bau Portal

Fabrication of 50 nm high performance strained-SiGe pMOSFETs with selective epitaxial growth

Loo, R. / Collaert, N. / Verheyen, P. / Caymax, M. / Delhougne, R. / Meyer, K. D.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Fabrication of 50 nm high performance strained-SiGe pMOSFETs with selective epitaxial growth

Loo, R. / Collaert, N. / Verheyen, P. / Caymax, M. / Delhougne, R. / Meyer, K. D.

Fabrication of 50 nm high performance strained-SiGe pMOSFETs with selective epitaxial growth

Loo, R. / Collaert, N. / Verheyen, P. / Caymax, M. / Delhougne, R. / Meyer, K. D.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Fabrication of 50 nm high performance strained-SiGe pMOSFETs with selective epitaxial growth

Contributors:

Loo, R. (author) / Collaert, N. (author) / Verheyen, P. (author) / Caymax, M. (author) / Delhougne, R. (author) / Meyer, K. D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 224 ; 292-296

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Shi, Z. / Onsongo, D. / Banerjee, S. K. | British Library Online Contents | 2004

Selective epitaxial growth of SiGe for strained Si transistors

Ning, X. J. / Gao, D. / Bonfanti, P. et al. | British Library Online Contents | 2006

Selective epitaxial growth of strained SiGe/Si for optoelectronic devices

Vescan, L. / Stoica, T. / Goryll, M. et al. | British Library Online Contents | 1998

Short channel effect improved strained-Si:C-source/drain PMOSFETs

Lee, M. H. / Chang, S. T. / Maikap, S. et al. | British Library Online Contents | 2008

A semiempirical surface scattering model for quantum corrected Monte-Carlo simulation of unstrained Si and strained Si/SiGe PMOSFETs

Pham, A. T. / Jungemann, C. / Nguyen, C. D. et al. | British Library Online Contents | 2006