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Oxygen transport in Czochralski silicon investigated by dislocation locking experiments
Oxygen transport in Czochralski silicon investigated by dislocation locking experiments
Oxygen transport in Czochralski silicon investigated by dislocation locking experiments
Murphy, J. D. (author) / Senkader, S. (author) / Falster, R. J. (author) / Wilshaw, P. R. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 134 ; 176-184
2006-01-01
9 pages
Article (Journal)
English
DDC:
620.11
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