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    Non-destructive diagnostic techniques for oxygen precipitates in Czochralski silicon

    New search for: Bazzali, A.
    New search for: Borionetti, G.
    New search for: Falster, R.
    New search for: Gambaro, D.
    New search for: Mule`Stagno, L.
    New search for: Olmo, M.
    New search for: Orizio, R.
    New search for: Porrini, M.

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    Non-destructive diagnostic techniques for oxygen precipitates in Czochralski silicon

    New search for: Bazzali, A.
    New search for: Borionetti, G.
    New search for: Falster, R.
    New search for: Gambaro, D.
    New search for: Mule`Stagno, L.
    New search for: Olmo, M.
    New search for: Orizio, R.
    New search for: Porrini, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Non-destructive diagnostic techniques for oxygen precipitates in Czochralski silicon

    New search for: Bazzali, A.
    New search for: Borionetti, G.
    New search for: Falster, R.
    New search for: Gambaro, D.
    New search for: Mule`Stagno, L.
    New search for: Olmo, M.
    New search for: Orizio, R.
    New search for: Porrini, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Non-destructive diagnostic techniques for oxygen precipitates in Czochralski silicon

    Contributors:

    Bazzali, A. (author) / Borionetti, G. (author) / Falster, R. (author) / Gambaro, D. (author) / Mule`Stagno, L. (author) / Olmo, M. (author) / Orizio, R. (author) / Porrini, M. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 23-26

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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