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Nanoimprint lithography using IR laser irradiation

Grigaliunas, V. / Tamulevicius, S. / Muehlberger, M. / Jucius, D. / Guobiene, A. / Kopustinskas, V. / Gudonyte, A.

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Nanoimprint lithography using IR laser irradiation

Grigaliunas, V. / Tamulevicius, S. / Muehlberger, M. / Jucius, D. / Guobiene, A. / Kopustinskas, V. / Gudonyte, A.

Nanoimprint lithography using IR laser irradiation

Grigaliunas, V. / Tamulevicius, S. / Muehlberger, M. / Jucius, D. / Guobiene, A. / Kopustinskas, V. / Gudonyte, A.

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Title:

Nanoimprint lithography using IR laser irradiation

Contributors:

Grigaliunas, V. (author) / Tamulevicius, S. (author) / Muehlberger, M. (author) / Jucius, D. (author) / Guobiene, A. (author) / Kopustinskas, V. (author) / Gudonyte, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 646-650

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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