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Nanoimprint lithography: an alternative nanofabrication approach

Sotomayor Torres, C. M. / Zankovych, S. / Seekamp, J. / Kam, A. P. / Clavijo Cedeno, C. / Hoffmann, T. / Ahopelto, J. / Reuther, F. / Pfeiffer, K. / Bleidiessel, G.

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Nanoimprint lithography: an alternative nanofabrication approach

Sotomayor Torres, C. M. / Zankovych, S. / Seekamp, J. / Kam, A. P. / Clavijo Cedeno, C. / Hoffmann, T. / Ahopelto, J. / Reuther, F. / Pfeiffer, K. / Bleidiessel, G.

Nanoimprint lithography: an alternative nanofabrication approach

Sotomayor Torres, C. M. / Zankovych, S. / Seekamp, J. / Kam, A. P. / Clavijo Cedeno, C. / Hoffmann, T. / Ahopelto, J. / Reuther, F. / Pfeiffer, K. / Bleidiessel, G.

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Title:

Nanoimprint lithography: an alternative nanofabrication approach

Contributors:

Sotomayor Torres, C. M. (author) / Zankovych, S. (author) / Seekamp, J. (author) / Kam, A. P. (author) / Clavijo Cedeno, C. (author) / Hoffmann, T. (author) / Ahopelto, J. (author) / Reuther, F. (author) / Pfeiffer, K. (author) / Bleidiessel, G. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 23 ; 23-31

Publication date:

2003-01-01

Size:

9 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

DDC: 620.1 / 660

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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