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Nanoimprint Lithography: Methods and Material Requirements

Guo, L. J.

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Nanoimprint Lithography: Methods and Material Requirements

Guo, L. J.

Nanoimprint Lithography: Methods and Material Requirements

Guo, L. J.

Access

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Document information

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Title:

Nanoimprint Lithography: Methods and Material Requirements

Contributors:

Guo, L. J. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 19 ; 495-513

Publication date:

2007-01-01

Size:

19 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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