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    Activation Treatment of Ion Implanted Dopants Using Hybrid Super RTA Equipment

    New search for: Kinoshita, A.
    New search for: Senzaki, J.
    New search for: Katou, M.
    New search for: Harada, S.
    New search for: Okamato, M.
    New search for: Nishizawa, S.
    New search for: Fukuda, K.
    New search for: Morigasa, F.
    New search for: Endou, T.
    New search for: Isii, T.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

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    Activation Treatment of Ion Implanted Dopants Using Hybrid Super RTA Equipment

    New search for: Kinoshita, A.
    New search for: Senzaki, J.
    New search for: Katou, M.
    New search for: Harada, S.
    New search for: Okamato, M.
    New search for: Nishizawa, S.
    New search for: Fukuda, K.
    New search for: Morigasa, F.
    New search for: Endou, T.
    New search for: Isii, T.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Activation Treatment of Ion Implanted Dopants Using Hybrid Super RTA Equipment

    New search for: Kinoshita, A.
    New search for: Senzaki, J.
    New search for: Katou, M.
    New search for: Harada, S.
    New search for: Okamato, M.
    New search for: Nishizawa, S.
    New search for: Fukuda, K.
    New search for: Morigasa, F.
    New search for: Endou, T.
    New search for: Isii, T.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Activation Treatment of Ion Implanted Dopants Using Hybrid Super RTA Equipment

    Contributors:

    Kinoshita, A. (author) / Senzaki, J. (author) / Katou, M. (author) / Harada, S. (author) / Okamato, M. (author) / Nishizawa, S. (author) / Fukuda, K. (author) / Morigasa, F. (author) / Endou, T. (author) / Isii, T. (author)

    Published in:

    Silicon Carbide and Related Materials - 2005 ; 803-806

    MATERIALS SCIENCE FORUM ; 527/529

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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