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Fabrication of 4H-SiC p-Channel MOSFET with High Channel Mobility
Fabrication of 4H-SiC p-Channel MOSFET with High Channel Mobility
Fabrication of 4H-SiC p-Channel MOSFET with High Channel Mobility
Okamoto, M. (author) / Tanaka, M. (author) / Yatsuo, T. (author) / Fukuda, K. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
Silicon Carbide and Related Materials - 2005 ; 1301-1304
MATERIALS SCIENCE FORUM ; 527/529
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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