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Epitaxial Growth of 4H-SiC (0001) by Sublimation Method Using Horizontal Furnace
Epitaxial Growth of 4H-SiC (0001) by Sublimation Method Using Horizontal Furnace
Epitaxial Growth of 4H-SiC (0001) by Sublimation Method Using Horizontal Furnace
Park, C. K. (author) / An, J. H. (author) / Lee, W. J. (author) / Shin, B. C. (author) / Nishino, S. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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