Fabrication and Analysis of Nano-Aluminum-Induced Low-Temperature Polycrystalline Silicon Film: Fid-Bau Portal

Fabrication and Analysis of Nano-Aluminum-Induced Low-Temperature Polycrystalline Silicon Film

Chu, H.Y. / Weng, M.H. / Yang, R.Y. / Huang, C.W. / Liu, C.C.

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Fabrication and Analysis of Nano-Aluminum-Induced Low-Temperature Polycrystalline Silicon Film

Chu, H.Y. / Weng, M.H. / Yang, R.Y. / Huang, C.W. / Liu, C.C.

Fabrication and Analysis of Nano-Aluminum-Induced Low-Temperature Polycrystalline Silicon Film

Chu, H.Y. / Weng, M.H. / Yang, R.Y. / Huang, C.W. / Liu, C.C.

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Document information

Title:

Fabrication and Analysis of Nano-Aluminum-Induced Low-Temperature Polycrystalline Silicon Film

Contributors:

Chu, H.Y. (author) / Weng, M.H. (author) / Yang, R.Y. (author) / Huang, C.W. (author) / Liu, C.C. (author)

Published in:

MATERIALS SCIENCE FORUM ; 594 ; 96-103

Publication date:

2008-01-01

Size:

8 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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