Metal vapor vacuum-arc ion implantation effects on the adhesion and hardness of ion-beam deposited Cr/Cu films: Fid-Bau Portal

Metal vapor vacuum-arc ion implantation effects on the adhesion and hardness of ion-beam deposited Cr/Cu films

Yu, M. / Zhang, J. / Li, D. / Meng, Q. / Li, W.

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Metal vapor vacuum-arc ion implantation effects on the adhesion and hardness of ion-beam deposited Cr/Cu films

Yu, M. / Zhang, J. / Li, D. / Meng, Q. / Li, W.

Metal vapor vacuum-arc ion implantation effects on the adhesion and hardness of ion-beam deposited Cr/Cu films

Yu, M. / Zhang, J. / Li, D. / Meng, Q. / Li, W.

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Document information

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Document information

Title:

Metal vapor vacuum-arc ion implantation effects on the adhesion and hardness of ion-beam deposited Cr/Cu films

Contributors:

Yu, M. (author) / Zhang, J. (author) / Li, D. (author) / Meng, Q. (author) / Li, W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 3276-3283

Publication date:

2007-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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