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Profiling of traps in SiO2/Al2O3 gate stack by the charge pumping technique
Profiling of traps in SiO2/Al2O3 gate stack by the charge pumping technique
Profiling of traps in SiO2/Al2O3 gate stack by the charge pumping technique
Crupi, I. (author) / Degraeve, R. (author) / Govoreanu, B. (author) / Brunco, D. P. (author) / Roussel, P. (author) / Van Houdt, J. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 889-891
2006-01-01
3 pages
Article (Journal)
English
DDC:
621.38152
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