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    Microstructures and Electrical Properties of Ru-C Nano-Composite Films by PECVD

    New search for: Sakata, M.
    New search for: Kimura, T.
    New search for: Goto, T.

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    Microstructures and Electrical Properties of Ru-C Nano-Composite Films by PECVD

    New search for: Sakata, M.
    New search for: Kimura, T.
    New search for: Goto, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Microstructures and Electrical Properties of Ru-C Nano-Composite Films by PECVD

    New search for: Sakata, M.
    New search for: Kimura, T.
    New search for: Goto, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Microstructures and Electrical Properties of Ru-C Nano-Composite Films by PECVD

    Contributors:

    Sakata, M. (author) / Kimura, T. (author) / Goto, T. (author)

    Published in:

    MATERIALS TRANSACTIONS ; 48 ; 58-63

    Publication date:

    2007-01-01

    Size:

    6 pages

    ISSN:

    1345-9678

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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