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    Electrical properties of low-dielectric-constant films prepared by PECVD in O2/CH4/HMDSO

    New search for: Borvon, G.
    New search for: Goullet, A.
    New search for: Mellhaoui, X.
    New search for: Charrouf, N.
    New search for: Granier, A.

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    Electrical properties of low-dielectric-constant films prepared by PECVD in O2/CH4/HMDSO

    New search for: Borvon, G.
    New search for: Goullet, A.
    New search for: Mellhaoui, X.
    New search for: Charrouf, N.
    New search for: Granier, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrical properties of low-dielectric-constant films prepared by PECVD in O2/CH4/HMDSO

    New search for: Borvon, G.
    New search for: Goullet, A.
    New search for: Mellhaoui, X.
    New search for: Charrouf, N.
    New search for: Granier, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Electrical properties of low-dielectric-constant films prepared by PECVD in O2/CH4/HMDSO

    Contributors:

    Borvon, G. (author) / Goullet, A. (author) / Mellhaoui, X. (author) / Charrouf, N. (author) / Granier, A. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 279-284

    Publication date:

    2002-01-01

    Size:

    6 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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