Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Microstructures and Electrical Properties of Ru-C Nano-Composite Films by PECVD
Microstructures and Electrical Properties of Ru-C Nano-Composite Films by PECVD
Microstructures and Electrical Properties of Ru-C Nano-Composite Films by PECVD
Sakata, M. (Autor:in) / Kimura, T. (Autor:in) / Goto, T. (Autor:in)
MATERIALS TRANSACTIONS ; 48 ; 58-63
01.01.2007
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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