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    Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

    New search for: Nakazawa, H.
    New search for: Miura, S.
    New search for: Kamata, R.
    New search for: Okuno, S.
    New search for: Suemitsu, M.
    New search for: Abe, T.

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    Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

    New search for: Nakazawa, H.
    New search for: Miura, S.
    New search for: Kamata, R.
    New search for: Okuno, S.
    New search for: Suemitsu, M.
    New search for: Abe, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

    New search for: Nakazawa, H.
    New search for: Miura, S.
    New search for: Kamata, R.
    New search for: Okuno, S.
    New search for: Suemitsu, M.
    New search for: Abe, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

    Contributors:

    Nakazawa, H. (author) / Miura, S. (author) / Kamata, R. (author) / Okuno, S. (author) / Suemitsu, M. (author) / Abe, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 264 ; 625-632

    Publication date:

    2013-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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