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The Raman Spectra Characteristics of a-CN~x Films Grown on Quartz Substrates by Newly Developed Surface Wave Microwave PECVD
The Raman Spectra Characteristics of a-CN~x Films Grown on Quartz Substrates by Newly Developed Surface Wave Microwave PECVD
The Raman Spectra Characteristics of a-CN~x Films Grown on Quartz Substrates by Newly Developed Surface Wave Microwave PECVD
Rusop, M. (author) / Abdullah, S. (author) / Adhikari, S. (author) / Omer, A. M. M. (author) / Soga, T. (author) / Jimbo, T. (author) / Umeno, M. (author)
SURFACE REVIEW AND LETTERS ; 13 ; 577-584
2006-01-01
8 pages
Article (Journal)
English
DDC:
530.417
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