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Structural characterization of nc-Si films grown by low-energy PECVD on different substrates
Structural characterization of nc-Si films grown by low-energy PECVD on different substrates
Structural characterization of nc-Si films grown by low-energy PECVD on different substrates
Le Donne, A. (author) / Binetti, S. (author) / Isella, G. (author) / Pichaud, B. (author) / Texier, M. (author) / Acciarri, M. (author) / Pizzini, S. (author)
APPLIED SURFACE SCIENCE ; 254 ; 2804-2808
2008-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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