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Phase-Field Simulation of Surface Morphology Evolution during Epitaxial Growth of SiGe/Si System
Phase-Field Simulation of Surface Morphology Evolution during Epitaxial Growth of SiGe/Si System
Phase-Field Simulation of Surface Morphology Evolution during Epitaxial Growth of SiGe/Si System
Takaki, T. (author) / Tomita, Y. (author)
KEY ENGINEERING MATERIALS ; 340/341 ; 1073-1078
2007-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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