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Epitaxial growth of Ge and SiGe on Si substrates

Nylandsted Larsen, A.

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Epitaxial growth of Ge and SiGe on Si substrates

Nylandsted Larsen, A.

Epitaxial growth of Ge and SiGe on Si substrates

Nylandsted Larsen, A.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Epitaxial growth of Ge and SiGe on Si substrates

Contributors:

Nylandsted Larsen, A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 454-459

Publication date:

2006-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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