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    Investigation into defects occurring on the polymer surface during the photolithography process

    New search for: Bosc, D.
    New search for: Maalouf, A.
    New search for: Haesaert, S.
    New search for: Henrio, F.

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    Investigation into defects occurring on the polymer surface during the photolithography process

    New search for: Bosc, D.
    New search for: Maalouf, A.
    New search for: Haesaert, S.
    New search for: Henrio, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Investigation into defects occurring on the polymer surface during the photolithography process

    New search for: Bosc, D.
    New search for: Maalouf, A.
    New search for: Haesaert, S.
    New search for: Henrio, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Investigation into defects occurring on the polymer surface during the photolithography process

    Contributors:

    Bosc, D. (author) / Maalouf, A. (author) / Haesaert, S. (author) / Henrio, F. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 6162-6164

    Publication date:

    2007-01-01

    Size:

    3 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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