Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Characterization of Ti-Zr-N films deposited by cathodic vacuum arc with different substrate bias

    New search for: Niu, E. W.
    New search for: Li, L.
    New search for: Lv, G. H.
    New search for: Chen, H.
    New search for: Li, X. Z.
    New search for: Yang, X. Z.
    New search for: Yang, S. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Characterization of Ti-Zr-N films deposited by cathodic vacuum arc with different substrate bias

    New search for: Niu, E. W.
    New search for: Li, L.
    New search for: Lv, G. H.
    New search for: Chen, H.
    New search for: Li, X. Z.
    New search for: Yang, X. Z.
    New search for: Yang, S. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of Ti-Zr-N films deposited by cathodic vacuum arc with different substrate bias

    New search for: Niu, E. W.
    New search for: Li, L.
    New search for: Lv, G. H.
    New search for: Chen, H.
    New search for: Li, X. Z.
    New search for: Yang, X. Z.
    New search for: Yang, S. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characterization of Ti-Zr-N films deposited by cathodic vacuum arc with different substrate bias

    Contributors:

    Niu, E. W. (author) / Li, L. (author) / Lv, G. H. (author) / Chen, H. (author) / Li, X. Z. (author) / Yang, X. Z. (author) / Yang, S. Z. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 3909-3914

    Publication date:

    2008-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc

    Niu, E. W. / Li, L. / Lv, G. H. et al. | British Library Online Contents | 2007

    Influence of pulsed substrate bias on the structure and properties of Ti-Al-N films deposited by cathodic vacuum arc

    Zhang, G. P. / Gao, G. J. / Wang, X. Q. et al. | British Library Online Contents | 2012

    Characterization of Zr-Si-N films deposited by cathodic vacuum arc with different N2/SiH4 flow rates

    Zhang, G. P. / Niu, E. W. / Wang, X. Q. et al. | British Library Online Contents | 2012

    Low-temperature deposited ZnO thin films on the flexible substrate by cathodic vacuum arc technology

    Yang, R. Y. / Weng, M. H. / Pan, C. T. et al. | British Library Online Contents | 2011

    Nanoindentation evaluation of cathodic vacuum arc deposited ZnO film on PET substrate

    Huang, Chien-Wei / Weng, Min-Hang / Pan, Cheng-Tang et al. | British Library Online Contents | 2016

    Back to top