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Slow positron beam study of nitrogen implanted CZ-Si subjected to rapid thermal processing
Slow positron beam study of nitrogen implanted CZ-Si subjected to rapid thermal processing
Slow positron beam study of nitrogen implanted CZ-Si subjected to rapid thermal processing
Hao, X. P. (author) / Yu, R. S. (author) / Wang, B. Y. (author) / Chen, H. L. (author) / Wang, D. N. (author) / Ma, C. X. (author) / Wei, L. (author)
APPLIED SURFACE SCIENCE ; 253 ; 6868-6871
2007-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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