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Defect Property in He^+ Implanted Silicon Probed by Slow Positron Beam
Defect Property in He^+ Implanted Silicon Probed by Slow Positron Beam
Defect Property in He^+ Implanted Silicon Probed by Slow Positron Beam
Zhou, X. Y. (author) / Zhang, T. H. (author) / Zhang, X. F. (author) / Weng, H. M. (author) / Fan, Y. M. (author) / Du, J. F. (author) / Han, R. D. (author)
MATERIALS SCIENCE FORUM ; 363/365 ; 475-477
2001-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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