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    Materials selection for thin films for radio frequency microelectromechanical systems

    New search for: Guisbiers, G.
    New search for: Van Overschelde, O.
    New search for: Wautelet, M.

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    Materials selection for thin films for radio frequency microelectromechanical systems

    New search for: Guisbiers, G.
    New search for: Van Overschelde, O.
    New search for: Wautelet, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Materials selection for thin films for radio frequency microelectromechanical systems

    New search for: Guisbiers, G.
    New search for: Van Overschelde, O.
    New search for: Wautelet, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Materials selection for thin films for radio frequency microelectromechanical systems

    Contributors:

    Guisbiers, G. (author) / Van Overschelde, O. (author) / Wautelet, M. (author)

    Published in:

    MATERIALS AND DESIGN -REIGATE- ; 28 ; 1994-1997

    Publication date:

    2007-01-01

    Size:

    4 pages

    ISSN:

    0264-1275

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.0042

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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